MF207400 - SEMI MF2074 - Guide for Measuring Diameter of Silicon and Other Semiconductor Wafers Revision:SEMI MF2074-0912 (Reapproved 0718) - Superseded The results obtained may differ

The results obtained may differ significantly from those obtained with the specified oxidation cycles

These attributes include electrical

SEMI C28-0704 (technical revision)

SEMI MF1535-1015 (Reapproved 1121)

and structural properties of silicon annealed wafers for 180 nm

MF207400 - SEMI MF2074 - Guide for Measuring Diameter of Silicon and Other Semiconductor Wafers Revision:SEMI MF2074-0912 (Reapproved 0718) - Superseded The results obtained may differThe diameter of semiconductor wafers is an important parameter in microelectronic fabrication. Wafer diameters must conform to the limits specified in SEMI M1; or other agreed upon limits, or product that is otherwise suitable may not fit correctly in process equipment. Cam follower edge rounding usually results in wafers that are circular. However, wafers ground with edge follower edge rounding equipment may be elliptically shaped. Measurements made