F00400 - SEMI F4 - 空気圧動作シリンダバルブの仕様 Revision:SEMI F4-1000 - Superseded Verification of performance of large

Verification of performance of large scale purifiers in nitrogen

originally published February 2000

一般用は3インチ，100 mm，125 mm，150 mmのウェーハを扱う基本ガイドラインである。

The intent of this Standard is to facilitate the integration of testing equipment into an automated semiconductor factory

This Test Method is applied for

F00400 - SEMI F4 - 空気圧動作シリンダバルブの仕様 Revision:SEMI F4-1000 - Superseded Verification of performance of largeGlobal Facilities CommitteeNorth American Facilites Committee2000828North American Regional Standards Committee20009SEMI On Line200010199020002 Referenced SEMI Standards SEMI F1 Specification for Leak Integrity of High Purity Gas Piping Systems and Components SEMI F19 Specification for the Finish of the Wetted Surfaces of Electropolished 316L Stainless Steel Components SEMI F20 Specification for 316L Stainless Steel Bar, Extruded Shapes, Plate and