E19300 - SEMI E193 - Specification for 300 mm Film Frame FOUP (FFF) volume-C • Consistency check of a

• Consistency check of a recipe with the recipe in Recipe Server just before execution (Pre-Execution Check)

This Document will specify methods

本仕様では，ハードコート極紫外線（EUV）マスクにマークする記号法について記載する。

Equipment Communication Standards1 Messages Transfer (SECS-I) or the protocol defined in SEMI E37

maintenance technicians and engineers

E19300 - SEMI E193 - Specification for 300 mm Film Frame FOUP (FFF) volume-C • Consistency check of aNOTICE: This Standard does not follow normal formatting rules; it is being published with colored text in Table 1, 10. 4. 1, 10. 4. 1. 2, 10. 4. 1. 3, and Table 2. 1 Purpose 1. 1 The purpose of this Specification is to establish basic physical dimensions for the film frame front opening unified pod (FOUP) which is intended to be used to transport and store 300 mm film frames, as specified by SEMI G74 and within integrated circuit manufacturing